MEMS Gauge Pressure Sensor Featuring Small Size and Low Power Consumption
• Ultra-miniature 6.1 × 4.7 × 8.2 mm (L × W × H).
• Superior electrical characteristics to capacitive type pressure sensors.
• 0 to 37 kPa pressure range.
• Offset voltage of -2.5±4 mV
• Span voltage of 31.0±3.1 mV
• Low Power consumption of 0.2 mW
• Low Temperature Influence
• Span of ±1.0%FS
• Offset of ±3.0%FS
