"This flow sensor works according to the principle of the hot-film anemometer and uses thecooling effect of the airflow that passes over the surface of the sensor element.
The output voltage changes to the same degree as the flow of air or gas through the inlet and outlet openings of the sensor housing.
Designed using a thin-film, thermo-insulated bridge structure with heating and two temperature sensor elements.
The bridge structure enables high measurement sensitivity as well as fast response times to the air/gas flow above the chip.
The two temperature sensors with central heat element enable the flow direction to be detected and throughput to be measured.
Main featuresSensor with amplifierOperating voltage: 10 - 15 VDCOutput voltage: 5 VDC at 1000 sccmRange: 0 to 10 SLPMResponse time: 3 msOperating temperature -20°C to +70°C(SLPM = standard litres per minute, calibrated with nitrogen (N2), connected via AMP (103956-3)) Only for medium: dry gases"