Description
This flow sensor works according to the principle of the hot-film anemometer and uses the
cooling effect of the airflow that passes over the surface of the sensor element.
The output voltage changes to the same degree as the flow of air or gas through the inlet and outlet openings of the sensor housing.
Designed using a thin-film, thermo-insulated bridge structure with heating and two temperature sensor elements.
The bridge structure enables high measurement sensitivity as well as fast
response times to the air/gas flow above the chip. The two temperature sensors with central heat element enable the
flow direction to be detected and throughput to be measured.
Main features
- Sensor with amplifier
- Operating voltage: 10 - 15 VDC
- Output voltage: 5 VDC at 1000 sccm
- Range: 0 to 10 SLPM
- Response time: 3 ms
- Operating temperature -20°C to +70°C
- (SLPM = standard litres per minute, calibrated with nitrogen (N2), connected via AMP (103956-3))
- Only for medium: dry gases
